7/20/2011	11:53:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/20/2011	11:53:42 AM	Recipe started at 11:53 AM
7/20/2011	11:53:42 AM	Helium valve closed
7/20/2011	11:53:42 AM	H2 valve closed
7/20/2011	11:53:42 AM	BCl3 valve closed
7/20/2011	11:53:42 AM	PH3 valve closed
7/20/2011	11:53:42 AM	SiCl4 pre valve closed
7/20/2011	11:53:42 AM	SiCl4 post valve closed
7/20/2011	11:53:42 AM	Main Vac valve closed
7/20/2011	11:53:42 AM	Bypass valve closed
7/20/2011	11:53:42 AM	Bubbler valve closed
7/20/2011	11:53:42 AM	Helium MFC set to  0.000000
7/20/2011	11:53:42 AM	H2 MFC set to  0.000000
7/20/2011	11:53:42 AM	BCl3 MFC set to  0.000000
7/20/2011	11:53:42 AM	PHl3 MFC set to  0.000000
7/20/2011	11:53:42 AM	SiCl4 MFC set to  0.000000
7/20/2011	11:53:42 AM	Bypass solenoid MFC set to  0.000000
7/20/2011	11:53:42 AM	Tube furnace set to 0
7/20/2011	11:53:45 AM	H2 valve closed
7/20/2011	11:53:45 AM	BCl3 valve closed
7/20/2011	11:53:45 AM	PH3 valve closed
7/20/2011	11:53:45 AM	SiCl4 pre valve closed
7/20/2011	11:53:45 AM	SiCl4 post valve closed
7/20/2011	11:53:45 AM	Main Vac valve closed
7/20/2011	11:53:45 AM	Bypass valve closed
7/20/2011	11:53:45 AM	Bubbler valve closed
7/20/2011	11:53:45 AM	Helium valve opened
7/20/2011	11:53:45 AM	Helium MFC set to  500.000000
7/20/2011	11:53:45 AM	H2 MFC set to  0.000000
7/20/2011	11:53:45 AM	BCl3 MFC set to  0.000000
7/20/2011	11:53:45 AM	PHl3 MFC set to  0.000000
7/20/2011	11:53:45 AM	SiCl4 MFC set to  0.000000
7/20/2011	11:53:45 AM	Bypass solenoid MFC set to  0.000000
7/20/2011	11:53:45 AM	Tube furnace set to 0
7/20/2011	11:54:50 AM	Helium valve closed
7/20/2011	11:54:50 AM	H2 valve closed
7/20/2011	11:54:50 AM	BCl3 valve closed
7/20/2011	11:54:50 AM	PH3 valve closed
7/20/2011	11:54:50 AM	SiCl4 pre valve closed
7/20/2011	11:54:50 AM	SiCl4 post valve closed
7/20/2011	11:54:50 AM	Main Vac valve closed
7/20/2011	11:54:50 AM	Bypass valve closed
7/20/2011	11:54:50 AM	Bubbler valve closed
7/20/2011	11:54:50 AM	Helium MFC set to  0.000000
7/20/2011	11:54:50 AM	H2 MFC set to  0.000000
7/20/2011	11:54:50 AM	BCl3 MFC set to  0.000000
7/20/2011	11:54:50 AM	PHl3 MFC set to  0.000000
7/20/2011	11:54:50 AM	SiCl4 MFC set to  0.000000
7/20/2011	11:54:50 AM	Bypass solenoid MFC set to  0.000000
7/20/2011	11:54:50 AM	Tube furnace set to 0
7/20/2011	11:54:51 AM	Run finished at 11:54 AM
7/20/2011	11:54:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/20/2011	11:54:58 AM	Helium MFC set to  70.000000
7/20/2011	11:55:00 AM	Helium valve opened
7/20/2011	11:55:14 AM	Helium valve closed
7/20/2011	1:08:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/20/2011	1:08:16 PM	Recipe started at 1:08 PM
7/20/2011	1:08:16 PM	Helium valve closed
7/20/2011	1:08:16 PM	H2 valve closed
7/20/2011	1:08:16 PM	BCl3 valve closed
7/20/2011	1:08:16 PM	PH3 valve closed
7/20/2011	1:08:16 PM	SiCl4 pre valve closed
7/20/2011	1:08:16 PM	SiCl4 post valve closed
7/20/2011	1:08:16 PM	Main Vac valve closed
7/20/2011	1:08:16 PM	Bubbler valve closed
7/20/2011	1:08:16 PM	Bypass valve opened
7/20/2011	1:08:16 PM	Helium MFC set to  0.000000
7/20/2011	1:08:16 PM	H2 MFC set to  0.000000
7/20/2011	1:08:16 PM	BCl3 MFC set to  0.000000
7/20/2011	1:08:16 PM	PHl3 MFC set to  0.000000
7/20/2011	1:08:16 PM	SiCl4 MFC set to  0.000000
7/20/2011	1:08:16 PM	Bypass solenoid MFC set to  0.000000
7/20/2011	1:08:16 PM	Tube furnace set to 0
7/20/2011	1:09:10 PM	Helium valve closed
7/20/2011	1:09:10 PM	H2 valve closed
7/20/2011	1:09:10 PM	BCl3 valve closed
7/20/2011	1:09:10 PM	PH3 valve closed
7/20/2011	1:09:10 PM	SiCl4 pre valve closed
7/20/2011	1:09:10 PM	SiCl4 post valve closed
7/20/2011	1:09:10 PM	Main Vac valve closed
7/20/2011	1:09:10 PM	Bubbler valve closed
7/20/2011	1:09:10 PM	Bypass valve opened
7/20/2011	1:09:10 PM	Helium MFC set to  0.000000
7/20/2011	1:09:10 PM	H2 MFC set to  0.000000
7/20/2011	1:09:10 PM	BCl3 MFC set to  0.000000
7/20/2011	1:09:10 PM	PHl3 MFC set to  0.000000
7/20/2011	1:09:10 PM	SiCl4 MFC set to  0.000000
7/20/2011	1:09:10 PM	Bypass solenoid MFC set to  0.000000
7/20/2011	1:09:10 PM	Tube furnace set to 0
7/20/2011	1:10:05 PM	Helium valve closed
7/20/2011	1:10:05 PM	H2 valve closed
7/20/2011	1:10:05 PM	BCl3 valve closed
7/20/2011	1:10:05 PM	PH3 valve closed
7/20/2011	1:10:05 PM	SiCl4 pre valve closed
7/20/2011	1:10:05 PM	SiCl4 post valve closed
7/20/2011	1:10:05 PM	Bypass valve closed
7/20/2011	1:10:05 PM	Bubbler valve closed
7/20/2011	1:10:05 PM	Main Vac valve opened
7/20/2011	1:10:05 PM	Helium MFC set to  0.000000
7/20/2011	1:10:05 PM	H2 MFC set to  0.000000
7/20/2011	1:10:05 PM	BCl3 MFC set to  0.000000
7/20/2011	1:10:05 PM	PHl3 MFC set to  0.000000
7/20/2011	1:10:05 PM	SiCl4 MFC set to  0.000000
7/20/2011	1:10:05 PM	Bypass solenoid MFC set to  0.000000
7/20/2011	1:10:05 PM	Tube furnace set to 0
7/20/2011	1:10:06 PM	Run finished at 1:10 PM
7/20/2011	1:10:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
